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We used an inline system equipped with a linear plasma enhanced chemical vapor deposition (L-PECVD) source available at low temperatures for the thin film encapsulation of flexible organic light emitting diode displays. This inline system can be used for coating on a moving substrate, which can increase productivity than a cluster system with the typical PECVD source. In this paper, we report the...
The liquid metal ion sources (LMIS) in focused ion beam (FIB) system have many advantages of high current density, high brightness and low ion energy spread. There are two electrodes being emitter and extractor for field ion emission in LMIS. But several LMIS have a new electrode called the suppressor. Characteristics of LMIS with a suppressor are investigated in terms of the electric field change...
The liquid metal ion sources (LMIS) in FIB system have many advantages of high current density, high brightness and low ion energy spread. Most FIB systems use LMIS because the ion beam spot size of LMIS is smaller than of gas field ionization sources (GFIS). LMIS basically consists of an emitter (needle, anode), a reservoir (gallium) and an extractor (cathode). But several LMIS have new electrode...
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