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This paper presents a new control scheme to compensate for the amplitude- and rate-dependent hysteresis behavior of a piezo-driven parallel stage developed for the application of biological cell manipulation. A variable phase-delay model with variable gain is established to describe the nonlinear hysteresis of the system. The proposed controller integrates an inverse model-based preview feedforward...
In this paper, the hysteresis modeling and compensation are carried out and verified for a piezo-driven XY parallel micropositioning stage aiming at a sub-micron precise motion tracking control. Specifically, inverse modified Prandtl-Ishlinskii (MPI) model-based feedforward in combination with a proportional-integral-derivative (PID) feedback control algorithm is implemented for the real-time control...
This paper presents the development and performance assessment procedures for a new XY parallel micropositioning platform (PMP) aiming at a submicrometer accuracy for microscale manipulation. The uniqueness of the proposed micro-parallel platform lies in that it possesses an uncomplicated structure as well as actuation isolation and output motion decoupling properties, which facilitates the adoption...
In this paper, a model reference adaptive controller (MRAC) is designed for a piezo-driven XY parallel micropositioning stage to compensate for the hysteresis effects aiming at a sub-micron accuracy motion tracking control. To convert the desired motion trajectory into voltage input, the inverse modified Prandtl-Ishlinskii (PI) hysteresis model is employed. The modified PI model is identified by optimizing...
This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate...
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