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We reported development of the gas vapor detection system using a piezoelectric driven microcantilever. The microcantilevers were fabricated by surface and bulk micromachining process. In order to discriminate 2,4-dinitrotoluene (DNT) in the air, the fabricated microcantilevers surface was coated by biological receptor, peptide, which is able to detect unique chemical among a variety number of chemically...
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