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This paper presents a single-chip integrated humidity sensor (IHS) capable of wireless operation through inductive coupling with a remote antenna. The 1.5mmx0.5mmx8mm sensor chip consists of a planar electroplated copper coil (20μm thick, 30μm pitch, and 23 turns) and a silicon substrate separated by a 4100-5600Å polyimide film. The resonant frequency of the IHS changes with humidity and the measured...