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In order to understand the relationship between the microstructures and superconducting properties of MgB 2 films, analytical TEM observations have been carried out. The films were fabricated by a KrF excimer laser deposition on Hastelloy substrates precoated with YSZ (yttria-stabilized zirconia). The deposited films were annealed under Ar atmosphere at 873 K for 1 h and at 953 K for 0.5 h...