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The force acting between molecules and substrates is crucial for the manipulation process. Atomic force microscopy (AFM) is not only a versatile tool for imaging in biological research, but also a versatile one for the manipulation of biological molecules. Because of the high mechanical resolution of AFM, it is preferred for the study of the interaction of mechanics in biological systems. This work...
In this paper, wafer bonding using Parylene as the adhesive layer is investigated. The experiments are carried out under various conditions in two approaches: Parylene-to-Parylene and Parylene-to-Silicon. By heating at 230??C and applying a bonding force in vacuum environment, both Parylene-Parylene and Parylene-Silicon are successfully bonded. The bonding quality is characterized by the joint area...
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