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Integrated solenoid inductors with magnetic core were designed and fabricated. An inductance above 70 nH was achieved while keeping the coil resistance below 1 Omega and the device area below 1 mm2. The inductance of the magnetic inductor was more than 30 times that of the air core inductor of the identical geometry, and the inductance density reached above 200 nH/mm2. Comparison with the planar spiral...
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