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In order to decrease the grain size of Al 2 O 3 coatings deposited from the usual AlCl 3 /CO 3 /H 2 reaction gas mixture, Al-acetylacetonate (Al-acac) was added in the concentrations of 1000, 10 000 and 50 000 mol-ppm (relative to mol AlCl 3 ). TiC-coated cemented carbide substrates were used.Extremely fine-grained Al 2 O 3 coatings...
Al 2 O 3 coatings were deposited by pyrolysis of Al-acetylacetonate (= Al-acac) in Ar-atmosphere on graphite substrates with different surface roughnesses and on TiC-coated cemented carbide substrates. Compact and uniform Al 2 O 3 coatings were obtained at temperatures up to 900°C on the cemented carbides as well as on the graphite substrates with high surface roughness...