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This paper reports the experimental investigation of the impact of vacuum chamber conditions (cleanliness level and vacuum pressure) of scanning electron microscopy (SEM) on the contact resistance of two-point in-situ nanoprobing. Using two typical types of conductive nanoprobe, two-point electrical nanoprobing is performed on silicon nanowires, during which changing trends of the nanoprobing contact...
This paper presents a MEMS device for simultaneous mechanical and electrical characterization of individual nanowires. The device consists of an electrostatic actuator and two capacitive sensors, enabling it to acquire all mechanical measurement data (force and displacement) electronically without relying on electron microscopy imaging. Electrical insulation within the suspended structures of the...
Nanomanipulation in space-limited environments (e.g., inside SEM, and particularly in TEM) requires small-sized nano manipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper reports on a millimeter-sized MEMS (microelectromechanical systems) based nano manipulator with a positioning resolution of 0.15 nm and a motion range of plusmn2.55 mum...
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