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We report applications of sub-5 μm diameter silicon microprobes and silicon dioxide microtubes fabricated by vapor-liquid-solid method and microfabrication techniques, to use in in-vivo animal experiments. Before animal experiments, electrical impedance and test signal detection via the microprobe electrode were investigated. According to the results, electrical impedance at 1 kHz is approximately...
Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully...
32 x 32 pH image sensors were successfully fabricated by using the CCD/CMOS image sensor technique, and real time imaging of a chemical reaction and pH distribution was carried out for the first time. The pH variations by a chemical reaction are observed by 200 ms step (i.e. 5 flames per sec). The pH image sensor was able to take a pH image of mouse stomach successfully. It means that the novel image...
We successfully fabricated a super high sensitivity charge transfer type pH sensor. The proposed pH sensor is possible to amplify the sensing signals without an external amplifier by accumulation cycle. The pH sensitivity was obtained 5048 mV/pH, which is approximately 100 times higher than the Ion Sensitive Field Effect Transistor (ISFET), which is the most familiar pH sensor using semiconductor...
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