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The formation of zinc silicate phase in nanocomposite (nc) ZnO–SiO x thin films, its dilution by ion irradiation and subsequent developments were investigated. The nc ZnO–SiO x thin films used in the study were grown using rf magnetron sputter deposition on silicon (Si) substrates. Thin films were also grown on transmission electron microscopy (TEM) grids in identical conditions. The...