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We propose a new guide mode resonant photodiode demonstrating better sensitivity for the infrared imaging. This comprises a backside dielectric sub-wavelength periodic structure and an absorbing region as thin as 90 nm. In this study, electro-optical characterizations of individual InGaAs detector featuring focal-plane array-compatible geometries are fully explained by electro-magnetic simulations...
The design principles and technology of high-efficient MSM-photodiode structures based on nanoscale metallic gratings which are used both as a tool for efficient light confinement and the photocarriers' collection are developed.
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