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This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge,...
This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small...
With the recent increase of the rotational speed of hard disk drives, nanoparticle contamination can cause serious problems including thermal asperity. We designed a comb-shaped clamp and spacer to improve the efficacy of the recirculation filter in the operation of the hard disk drive (HDD). We calculated flow characteristics by a commercial computational fluid dynamics (CFD) code for six cases of...
This paper demonstrates a hybrid particle classification and condensation device based on both aerodynamics and electrostatics using a micro virtual impactor (muVI). The muVI is capable of classifying the nanoparticles according to their size and condense their number concentration that we are interested. The muVI was fabricated using polymer micromachining. Its classification efficiency was examined...
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