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Thermal conductivities (TCs) of ZnO thin films of thickness 80–276nm prepared by sol–gel method are measured by the transient thermoreflectance (TTR) system. The obtained TCs ranging from 1.4 to 6.5W/mK decrease while the thickness decrease. The measured TCs are much smaller than those of bulk ZnO, which is about 100W/mK. The possible reasons for the decrease are the grain boundary and defects. The...