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Optical emission spectroscopy and Langmuir probe have been used to study the power dependence of medium frequency, 100kHz, pulsed magnetron sputtering discharge. Copper target was sputtered in the argon atmosphere. The examined power ranged from 0.5 to 4.5kW which gave an average power density on target surface from 25 to 115W/cm 2 . Optical spectroscopy did not reveal any significant changes...