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A method of depositing polydimethylsiloxane (PDMS) onto microfabricated surfaces by spray coating is presented. Low-viscosity PDMS combinations suitable for spraying are developed by mixing Dow Corning Sylgard 184 with 200 Fluid 20cSt, and also by dilution with hexane. Spray coating is carried out on rotating substrates using blank Si wafers. Film quality is characterised with mechanical and optical...
Aligned, multilevel micro contact printing without dedicated printing equipment is demonstrated. Miniature print engines are constructed from silicon parts using MEMS technology. The method is extended to include electrostatically driven patterning of flexible substrates.
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