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A compact full-field photon-based microscope based on a desktop-size 46.9 nm wavelength extreme ultraviolet laser that captures images with a single nanosecond laser pulse and with a measured spatial resolution of 54 nm is described.
We have developed compact laser-pumped and discharge-pumped lasers operating at wavelengths of lambda=13.2 nm and lambda=46.9 nm respectively, and have used them in the demonstration of nanoscale full field imaging, nanopatterning, and nanoscale laser ablation. Using these new compact short wavelength lasers we have built two microscopes, using lambda=46.9 nm or lambda=13.2 nm laser illumination....
Arrays of holes and pillars were fabricated by multiple exposure interferometric lithography using a table top lambda = 46.9 nm wavelength laser. Size and the feature characteristic is controlled changing the applied exposure dose.
Arrays of nano-dots were demonstrated by multiple exposure interferometric lithography using a table top lambda=46.9 nm wavelength laser. Patterns of different geometries with features ~60 nm FWHM were printed controlling the exposure dose.
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