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We demonstrate the use of spatiotemporal coherence-gated light scattering for the continuous measurement of the time-evolving mechanical properties of biopolymer hydrogels undergoing viscoelastic modulations. Changes in both the optical and mechanical characteristics of the medium can be monitored using the same instrument and measurement procedure.
This paper presents a Si-CMOS-MEMS fabrication process that forms released structures out of a 10 µm CMOS metal and oxide stack along with a 50 µm-thick section of the underlying silicon substrate. The process employs back-side silicon grinding that provides silicon mean roughness of 20 nm and maximum peak-to-valley roughness of 264 nm. The thinned MEMS substrate is bonded with solder preforms to...
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