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We propose a design for high Q-factor, pillar-based photonic crystal cavities, with the goal of enhancing radiation–matter interaction in planar slot waveguides. The Q-factor is optimized for transverse-magnetic-like (TM-like) cavity modes, and it is found that a maximum Q≃45000 can be reached by proper design of the pillars defining the cavity region. As an application, we study the Purcell enhancement...