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Zinc oxide (0001) bulk crystals were implanted by 100 keV H2+ ions with various fluences in the range of 5×1016 to 3×1017 cm–2. Surface layer exfoliation was observed in the case of samples that were implanted with fluence higher than 2.5×1017 cm–2, either in the as‐implanted state or after annealing at higher temperatures up to 500 °C. The roughness of the exfoliated surfaces, as measured using atomic...
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