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The structure design of an improved dual-mass decoupled micro-gyroscope(DDMG) was presented in the paper. The non-ideal decoupled error was suppressed by the improved drive decoupled beam. The improved drive decoupled beam reduced the drive decoupled torque by decreasing the moment arm, which was beneficial to suppress the rotational displacement error of sense frame in drive mode. At the same time,...
The quadrature error analysis, structure design and simulation of a symmetric decoupled silicon micro-gyroscope with high decoupling performance are present in the paper. The improvements of straight beam, the anchor and the balance beam greatly restrained the mechanical error. In the drive mode, the maximum displacement of the sense framework along the sense axis is 0.088% of the vibration amplitude...
In order to realize the precise control for the drive frequency of the micro electromechanical system (MEMS) gyroscope, a frequency control scheme based on phase locked loop (PLL) was proposed in the article. The working principle of the MEMS gyroscope was analyzed which pointed out the importance of the drive frequency. The frequency control process with PLL was deduced which showed that the drive...
To further improve the performance of the bias stability which is the key character for MEMS gyroscope in navigation application, a new digital self-oscillation based drive circuit with drive phase correction is proposed. Started with the gyroscope working principle, analyzed the factors that may affect the bias output. Compared with drive amplitude control which already got a higher precision, the...
Described in this paper is a new Microelectromechanical Hybrid Gyroscope (MHG), with advantages not only in the potentiality of achieving the high precision like the traditional dynamically tuned gyroscope (DTG), but also in small size and low cost like the Silicon Micromachined Gyroscope (SMG). The transfer coefficient of the moment is derived, with influence factors analyzed. A new tuning method...
The dual-mass double-linear vibrational gyroscopes are insensitive to the environment, and their differential outputs can effectively suppress the common mode interference. A structure-decoupled dual-mass MEMS(micro-electro-mechanical system) gyroscope is studied in this paper, which can realize the full decoupling of the driving mode and sensing mode. In order to improve the performance of the dual-mass...
This paper deal with a new symmetrical and Decoupled Silicon Micro-Gyroscope (DSMG). By the simplified motion model of the DSMG, the mechanical coupling error from the width errors of suspension beams is analyzed and deduced. The simulation shows that the simulated results of mechanical coupling error basically equal to the calculation results. The characterization test results of the DSMG show that...
The performance of silicon micro-gyroscope (SMG) is influenced deeply by quadrature error and offset error. The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are enduced. In order to eliminate the effects of the quadrature error and offset error, as well as the inherent non- linearity in the capacitance-type sensors, a...
In this paper, we present work on the design, fabrication, readout technique and vacuum packaging of z-axis gyroscopes. A vacuum package that houses the gyroscope and its control electronics has bee built and tested. The entire gyroscope package including control electronics is approximately phi42 times 24mm in dimensions. This vacuum packaged gyroscope has a scale factor of 19.8mV/deg/sec with a...
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