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Current information devices will be confronted with a serious physical limit in the lateral downsizing in the future. An alternative approach for continuous progress in the device performance is intensively demanded. An integration of multi functionality, such as memory and logic components, is a promising solution for an increasing requirement in various system applications [1,2]. In the present...
For conventional lens to control the propagation of electromagnetic (EM) wave, the designed surface geometries or spatial variation of the refractive index distribution is a must to provide the gradual phase changes accumulated along the transmission path. The required thickness and the complication in terms of fabrication limit its applicability in some cases. The metasurface with phase discontinuity[...
This paper investigated pH measurements using ZnO based Surface Acoustic Wave Resonator (SAW). The resonant frequency of the SAW decreased as pH changed from 7 to 2 (acid region) or from 7 to 12 (alkaline region). The detection limits were 0.03 and 0.02 pH change, respectively, which were comparable to commercial pH meters. The interaction between hydronium (H3O+) or hydroxide (OH−) and ZnO was proposed...
This abstract describes room temperature ozone sensing using a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of the FBAR decreased upon ozone exposure due to the density increase of the ZnO film. Ozone can be adsorbed on the ZnO surface by capturing free electrons from the film, which increases the film density. The minimum detectable concentration is 21 ppb (parts per billion)...
This paper describes the new design and material selection used to improve the sensitivity of ionizing radiation sensing with a zinc oxide based Film Bulk Acoustic-Wave Resonator (FBAR). Prior results [1] demonstrated that the parallel resonant frequency of the FBAR decreased after irradiation due to radiation-induced charge trapping in the SiN. Here, by employing Plasma Enhanced Chemical Vapor Deposited...
Background: Radial modulation (RM) is a promising dual band approach for high frequency microbubble (MB) imaging. A low frequency (LF) ultrasound pulse is used to manipulate the MB radius while a synchronized high frequency (HF) pulse successively measures MB backscatter in compressed and expanded states. RM signal amplitude has been shown to increase with LF signal amplitude, but is ultimately limited...
This paper described ultraviolet (UV) radiation sensing using ZnO based Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 muW/cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase of the FBAR UV sensor was proposed to be due to...
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