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This paper reports experimental results and molecule-modeling analysis on origin of specific molecule-adsorption induced surface-stress. Using self-sensing piezoresistive micro-cantilevers, specific surface-adsorption experiment for a group of relative molecules is implemented, with the generated surface-stress recorded. Compared with the balanced space of self-assembled monolayer (SAM) on Au-(111)...
A SiO2 quad-cantilever micro-sensor with a self-sensing piezoresistor integrated is developed for on-the-spot chemical detection. Four piezoresistors are integrated in four cantilevers and the sensing signal is outputted from a half-sensitive Wheatstone bridge. The new single-sided micromachining process features low-cost and high-yield. Modified with a novel self-assembled monolayer (SAM) on two...
The paper reports an ultra-thin silicon resonant cantilever sensor with a novel through-cantilever doped piezoresistive sensing element and a Lorentz-force resonance exciting element integrated. Torsion-mode resonance is used where shear-stress piezoresistance can be used for the 95 nm-thick silicon nano-cantilever. Thanks to the ultra-thin cantilever where surface sensing effect becomes dominant,...
A top-down formed four-cantilever micro-sensor structure is equipped with self-assembled dual monolayers on the surfaces for specific detection to trace explosive and depression of environmental cross-talk. Sensor design of the four-lever scheme, micro-fabrication, surface modification of the dual monolayers and experimental results for ultra-sensitive detection of explosive are sequentially related...
Using piezoresistive SiO 2 microcantilever technology, we present an ultra-sensitive chemical sensor for trace organophosphorus vapor detection. A self-assembled composite layer of Cu 2+ /11-mercaptoundecanoic acid is modified on the surface of the sensing cantilever as a specific coating to capture PO containing compounds. Experimental results indicate that the sensor can be quite...
Presented is an ultra-sensitive piezoresistive SiO2 microcantilever sensor for trace TNT detection. A thin single crystalline silicon piezoresistor is encapsulated in a SiO2 cantilever for on-chip electric readout. The cantilever can lead to a more sensitive characteristic compared with conventional silicon cantilever because of a much lower Young's modulus of SiO2. Moreover, fully covered by SiO2...
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