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This paper discusses the crack problem of band width in a semi-infinite plane, we refer to the singular integral equation theory to this problem and transform the boundary conditions into the boundary value problem of analytic function. Thus the problem can be transformed into the singular integral equations of Cauchy problem. Then by a series of operations, the problem becomes a singular integral...
This paper reports a novel top-down and bottom-up compatible technique for sensing materials self-aligned upload onto the specific area of sensor. Using a lift-off-like fabrication process, hydrophobic self-assembly monolayer (SAM) is patterned on the non-sensing area of suspended heating-plate while the surface of sensing area is kept hydrophilic by chrome layer. Constrained by hydrophobic surface,...
Solenoid coil is a very important structure in micro-electronic filed. In this paper, we for the first time present a method that can fabricate solenoid coil by casting. The named micro-casting method is like macro-scale casting, however micro-scale liquid phenomena is introduced as a gating system to overcome high surface-tension. Together with silicon bulk micromachining, integrated solenoid coils...
MOF (metal-organic framework) material of Ni2(dobdc) (where dobdc = 1,4-dioxido-2,5-benzenedicarboxylate) nanocrystals is, for the first time, explored as resonant-gravimetric sensing material for CO detection. Due to the ultra-high surface-area and the active metal center-sites, the MOF of Ni2(dobdc) exhibits adsorbing induced high-performance sensing to CO gas. By loading the MOF material onto resonant...
Chip-based semi-packed gas chromatography (GC) columns coated with two kinds of mesoporous silica (MS) stationary phase have been explored and compared in this paper. For the first time, the influence of pore size of the stationary phase on the separation performance in a micro GC (μGC) column has been investigated. As has been demonstrated, full separation of heavy hydrocarbons (C5-C10) can be achieved...
This paper reports a high sensitive micro thermal conductivity detector (μTCD) with sandwich structure, which is composed of glass substrate, silicon-on-insulator (SOI) with micro channels and glass with micro channels. A suspended cross-mesh structure includes a Pt thermistor protected by two SiNx layers and a cross-mesh support made of top silicon of SOI, and it is released by deep reactive ion...
This paper reports the application of electret materials on triboelectric generator for enhanced performance comparing to the traditional nanogenerator simply based on contact electrification. Various electrets like PTFE film, TOPAS, CYTOP and COC were prepared and charged under different conditions to explore the optimal output. It is proved that the performance of the triboelectric generator can...
Single-sided fabricated monolithic tri-axis piezoresistive high-shock accelerometers are reported in this paper. A single-cantilever structure and two dual-cantilever structures are designed and employed to detect the Z-axis and X-/Y-axis high-shock accelerations, respectively. Different longitudinal dimensions of the cantilevers can be achieved and well controlled with a (111) wafer single-sided...
A novel multi-dimensional nanostructure constructed with three types of nano-building-block is used as electrochemical sensing material to detect trace dopamine which plays as neurotransmitter in body-fluids. For the multi-dimensional multi-level sensing nanostructure construction, nanosheet of graphene oxide (GO) is herein served as nano-substrate. By using hydrothermal method, ZnO nanowires are...
This paper presents a capacitive acoustic emission sensor with movable electrodes, which operate at stopband. Stopband electrodes cannot be excited by an AE signal, while the substrate vibrates with the signal. The change in the capacitance between the stopband electrodes and substrate is proportional to the amplitude of the AE signal. As bandwidth and sensitivity are not limited by the mechanical...
This paper presents a novel front-side non-SOI fabricated tri-axis capacitive accelerometer with a dual quantization electromechanical sigma-delta modulator (EM-ΣΔΜ) interface. It can be used for realizing monolithic inertial microsystem units. The 2.6mm×2.6mm sized tri-axis accelerometer is designed and fabricated with a high-yield bulk-micromachining fabrication process using only front-side etching...
This paper presents an electret based vibration energy harvester, which has excellent performance with both broad bandwidth and high normalized power density (NPD). Wafer-level MEMS fabrication process is proposed with detailed study on the packaging pressure and air damping effect. With an overall volume of about 0.187 cm3, the harvester can generate a maximum power of 4.95 μW with bandwidth of 12...
The paper reports an as tiny as 0.4mm×0.4mm piezoresistive absolute pressure sensor (barometer) for as low-cost as 0.01US$ product, which is widely demanded in smart-phone, drone and consumer-electronic market. The sensor is designed (3D scheme in Fig.2 (a)) and fabricated by a novel scar-free MIS (micro-holes inter-etch & sealing, with the same abbreviation as minimally invasive surgery) MEMS...
Visual prosthesis based on penetrative optic nerve (ON) stimulation is an alternative approach to partially restore visual function. As one of the most important factors, pulse shape of electrical stimulus is a major consideration in the design of ON visual prosthesis. Animal experiments showed that the evoked responses in visual cortex (V1) to ON electrical stimulation are dependent on the stimulus...
Epiretinal prostheses have been reported to restore partial visual function of patients suffering from retinal degenerative diseases. The design of stimulating electrode array of the epiretinal prosthesis is one of the pivotal factors to influence its performance and spatial resolution. Because the cell density distribution of retinal ganglion cells(RGCs) and retinal anatomic structure varied with...
We have reported a prototype of wireless sensor node with ultra-low power consumption which has promising application on the temperature monitoring in central air conditioning system. Air-flow driven nanogenerators are utilized to harvest electric energy directly from the wind tunnel in a building. Using a microcontroller unit with event-driven strategy, the wireless sensor nodes can send out a temperature...
We have proposed a structural transformation method in Mo-doped In2O3 nanotubes (Mo-In2O3 NTs), by electron-beam irradiation with a high-resolution transmission electron microscope. Uniform Mo-In2O3 NTs have been presynthesized by a facile electrospinning method and calcined in air at 600 °C. As is expected, a large number of ultrafine nanoparticles gradually generate on the surface of Mo-In2O3 NTs...
In this paper, we present an alloy via-filling method that does not need pre-metallization of via holes and can be realized on wafer level. Through-Silicon Via(TSV)/Through Glass Via(TGV) with different geometries can be filled simultaneously in few minutes, instead of few hours by electroplating. A specific equipment is made for the alloy via-filling method. The alloy TSV filling method presented...
In this paper, high isolation K/Ka band monolithic microwave integrated circuit (MMIC) single pole double throw (SPDT) switches with different topologies are proposed and discussed. By using a 0.07 µm GaAs high electron mobility transistor (HEMT) process, the shunt type and series-shunt type of passive HEMT SPDT switches are designed and compared. In 24∼27GHz, both switches demonstrate an isolation...
TSV is an important interconnection for advanced packaging. Via-filling by molten alloy is considered as an alternative to electroplating process. In this paper, a micro-casting method for TSV fabrication is proposed and demonstrated. This TSV fabrication method owns advantages of fast-filling and lost-cost.
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