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The kinetic and equilibrium aspects in growing lead titanate thin film, using the reaction system Pb(C 2 H 5 ) 4 /Ti(OPr i ) 4 /O 2 /N 2 , are investigated in a cold-wall reactor, especially those related to its abnormal growth on silicon oxide. Equilibrium calculations indicate that volatility of Pb-species is much higher than that of Ti-species,...