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The reactivity of nitrogen depends on the excitation of the nitrogen molecules. The vibrational energy of the neutral species in the fundamental electronic state depends on the energy transfer during collisions. A self consistent model has been developed to calculate the isoconcentration regions of neutral and excited species within the positive column of a weakly ionized plasma. The model considers...
Plasma deposition processes involve complex phenomena which render the design and optimization of industrial equipment difficult to perform. In the particular case of silane plasmas used to produce amorphous silicon, two flow arrangements were studied by numerical modeling of mass transport. The modeling of the first geometry, using inlet slit gas feed, showed a decrease of both silane concentration...
Plasma deposition processes involve complex phenomena which render the design and optimization of industrial equipment difficult to perform. In the particular case of silane plasmas used to produce amorphous silicon, two flow arrangements were studied by numerical modeling of mass transport. The modeling of the first geometry, using inlet slit gas feed, showed a decrease of both silane concentration...
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