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The dopant compensation mechanism in 2-5 mol.% niobium (Nb)-doped Pb(Zr 0.52 ,Ti 0.48 )O 3 (PZT) thin films was studied to obtain single phase compositions. Transmission electron microscopy showed that the Nb-doped composition batched according to the Ti vacancy model, was single phase. This indicated that niobium donors were compensated by titanium...