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We experimentally demonstrate that high energy femtosecond laser pulses can be compressed using nonlinear propagation in gas-filled planar hollow waveguides. A stability analysis provides guidelines for up-scaling the compressible pulse energy without spatial beam-breakup.
We experimentally demonstrate that high energy ultrashort pulses can be compressed through self-phase-modulation in hollow planar waveguides. The beam is guided in one transverse dimension and propagates free in other, allowing scalability to higher energies.
Deep etching of Ge-doped SiO 2 using an epoxy based negative resist and a Chromium film as a mask in CHF 3 /O 2 plasma has been investigated. Parameters varied in design that include radio-frequency (RF) power, gas ratio, work pressure and gas total flux, and the major etch responses including etch rate and selectivity are modeled. In the high etch rate and high selectivity...
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