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Thin-film WO3 sensor with a MnO2 filter was prepared to reduce interference of O3 for NO2 detection. The multi-films (WO3 film, MnO2 filter and WO3+MnO2 insulting layer) were deposited by radio frequency sputtering. The microstructure and crystalline phase of the films were characterized with SEM and XRD. The sensors were tested for 25–200 ppb O3 and 50–400 ppb NO2 in moist air at temperatures ranging...
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