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Piezoelectric ultrasonic motors (PUMs) are based on the concept of driving the runner by a mechanical vibration excited on the stator via the converse piezoelectric effect. They exhibit merits of small size, simple structure, quick response, high accuracy and resolution, self-locking when power off and a lack of electromagnetic radiation. The linear PUMs become the research focus in recent years as...
A U-shaped linear piezoelectric ultrasonic motor (PUM) was proposed, designed and tested in this work, in which three longitudinal transducers were used together to achieve the linear driving by two feet synchronously. Longitudinal vibrations of the transducers were generated with certain temporal shift to form the desired elliptical movements on the two driving feet. Finite element method (FEM) was...
Miniaturized actuators are a key element for the manipulation and automation at small scales. Here, we propose a new miniaturized actuator, which consists of an array of micro gas bubbles immersed in a fluid. Under ultrasonic excitation, the oscillation of micro gas bubbles results in acoustic streaming and provides a propulsive force that drives the actuator. The actuator was fabricated by lithography...
This paper reports a MEMS resonator with closed-loop vibration control which can be parametric driven at ambient pressure. Non-interdigitated comb fingers are used as parametric force electrodes and optimized design enables the electrodes to generate large electrostatic stiffness, which makes parametric drive possibly realized at ambient pressure and low Q-factor (65.8). Closed-loop vibration control...
According to the characteristics of force-frequency character of quartz crystal and a kind of structure of mono-base multi-electrode quartz resonator, a new signal processing scheme is presented. Base frequency signals are firstly outputted when different places resonator is vibrated synchronously, and then are sent to mixer, after difference frequency signals are obtained, signals are sent to mixer...
Based on the relation of force sensitive characteristic of quartz crystal resonator with adding force azimuth and wave propagation in crystal lame, and according to the wave restrict theory of crystal vibration, the integrated three-electrode resonator is designed and fabricated on the same crystal wafer. We study the relations of the resonators with this structure the force sensitive characteristic...
An ANSYS analysis and computation of the stress distribution in circular AT cut quartz wafer was carried out, when quartz wafer was subjected to a force along its diameter which was parallel to the x axis, the force-frequency coefficient of quartz resonator were tested by using plated electrode on different region. Experiment proves that the result of ANSYS analysis is nearly consistent with experiment,...
Parameter vibration of horizontal cable with axial excitation at end on deck has been investigated. The change laws of cable displacement response and tension have been discussed. Based on cables in practical engineering, partial differential equation of horizontal cable parameter vibration has been mathematically solved. Frequency sweep and parameters have been analyzed. The occurrence condition...
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