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This paper presented a novel 0–3 kPa piezoresistive pressure sensor with high sensitivity and linearity. A shuriken-structured diaphragm (SSD) is designed for the first time to solve the conflict between the sensitivity and linearity for piezoresistive pressure sensors. A trade-off between the stress on the diaphragm edge and the deflection of the diaphragm was achieved by this SSD design according...
This paper discussed a novel design of the piezoresistive pressure sensor with high sensitivity and high linearity. Partially structured diaphragm with four peninsulas and a center boss was applied to improve the sensor performance for low pressure measurement. Finite element analysis (FEA) was applied to evaluate the sensor design. Simulation results indicated that a sensitivity of 25.3 mV/V full-scale...
A novel high-sensitivity pressure sensor with peninsula structured diaphragm was designed to avoid the nonlinearity problem in the area of low pressure sensing. Finite element analysis (FEA) was applied to optimize the sensor design. Sensitivity was improved by nearly 40% by the optimization of piezoresistors in the peninsula. The proposed design exhibited high linearity and high sensitivity synthetically...
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