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This paper presents the integration and characterization of self-supporting yttrium barium copper oxide (YBCO) microbolometer arrays (pixel size of 31 times 31 mum2) with on-chip constant current buffered direct injection (CCBDI) readout circuit in AMI Semiconductor 1.5 mum double-poly-double-metal n-well 2.5 V complementary metal-oxide-semiconductor (CMOS) technology. The uncooled semiconducting...
Semiconducting Yttrium Barium Copper Oxide (Y-Ba-Cu-O) microbolometers based on self-supporting structure are fabricated and characterized with on-chip constant current buffered direct injection (CCBDI) readout integrated circuit (ROIC) in AMI 1.5 mum double-poly-double-metal n-well 2.5 V complementary metal-oxide-semiconductor (CMOS) technology. Self-supporting Y-Ba-Cu-O microbolometers exhibit low...
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