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Microfabricated cantilevers are proving their potential as excellent tools for analysis applications. In this paper, we describe the design, fabrication and testing of resonant micro cantilevers with integrated transparent fluidic channels. The cantilevers have been devised to measure the density of fluids or detect particles suspended in a fluid by sensing the change in total mass of the structure...
We present microcantilever-based sensors for the characterization of biopolymer degradation by enzymes. Thin films of Poly(L-lactide) (PLLA) were spray-coated onto SU-8 cantilevers with well-known material properties and dimensions. The micromechanical sensors were immersed in solutions of proteinase K to investigate enzymatic degradation of PLLA. A decrease of the resonance frequency after immersion...
Resonant micro and nano strings are of interest for sensor applications due to their extraordinary high quality factors, low mass and tunable resonant frequency. It has been found that the quality factor of strings is usually limited by clamping loss. In this work, clamping loss has been addressed by varying the clamping design and string geometry. We present silicon nitride micro strings with quality...
We present all-polymer resonant microbeams which can detect the adsorption of streptavidin and DNA on the surface in aqueous solution with a high selectivity. The polymer surface allows the direct functionalization with the receptor biomolecules without intermediate Au-layer. The highly sensitive resonant microbeams offer a low-cost system for disposable and label-free biosensing applications. Minimal...
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