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We demonstrate an implantable MEMS drug delivery device to conduct controlled and on-demand, ex vivo drug transport to human eye tissue. Remotely operated drug delivery to human post-mortem eyes was performed via a MEMS device. The developed curved packaging cover conforms to the eyeball thereby preventing the eye tissue from contacting the actuating membrane. By pulsed operation of the device, using...
Conference proceedings front matter may contain various advertisements, welcome messages, committee or program information, and other miscellaneous conference information. This may in some cases also include the cover art, table of contents, copyright statements, title-page or half title-pages, blank pages, venue maps or other general information relating to the conference that was part of the original...
This paper reports on quantitative evaluation of influence of dopamine neurons on the flight locomotion of a fruit fly (Drosophila menanogaster). The aerodynamic force was measured by MEMS triaxial forcesensor. We compared the aerodynamic force of the genetically modified flies whose dopamine neurons (DDCII) are functionally blocked with that of the wild type ones. The peak aerodynamic force generated...
This study presents a novel polymer MEMS structure with Fe3O4-glycerol fill-in. Thus, the concept of magnetorheological effect is exploited to increase the stiffness of polymer MEMS structure by applying a magnetic field. The stiffness enhancement by magnetic field is achieved through the following mechanisms: (1) distribution of the Fe3O4 particles in glycerol would change from isotropic to anisotropic,...
This paper demonstrates a microbial-robot that migrates in low Reynolds number fluidic environments powered by motile flagellated bacteria. To immobilize the flagellated bacteria strongly, we utilized bacterial cellulose (BC), which was produced by Gluconacetobacter xylinus. We evaluated the adhesion between the BC and the flagellated bacteria, Aliivibrio fischeri using a microfluidic shear device...
We propose a muscle based bioactuator that can be driven in air. As the driving force of this actuator, we mounted aligned muscle fiber sheets between poles, with gold electrodes located at the edges of the muscle fibers to stimulate them. The muscle fibers are in a hollow space covered by a collagen structure to preserve the actuating properties in a wet condition. In the experiments, we prove that...
We have investigated the mechanism of a bristled wing of thrips by using an artificial cantilever-based wing. Five kinds of the artificial bristled wing, which had the similar size of the thrips wing, with a different hair gap were evaluated in a wind tunnel. Experiment results suggested that at low hair-gap-based Reynolds number (<10), the bristled areas of the wing acted as an imaginary airflow...
This paper adopts the design strategies involved in the biological flow sensors present on the body of the blind cave fish in order to engineer MEMS artificial flow sensors by employing micro/nano fabrication technologies. The MEMS sensor developed consists of Si60 polymer haircells fabricated by stereolithography. Biomimetic cupular fibrils are developed by electrospinning a solution of polyL-lactide/e-caprolactone...
We report a new silicon MEMS accelerometer based on differential Frequency Modulation (FM) with experimentally demonstrated self-calibration against dynamic temperature environment and μg-level Allan deviation of bias. The sensor architecture is based on resonant frequency tracking in a vacuum packaged SOI tuning fork oscillator with a high Q-factor. The oscillator is instrumented with a DC voltage...
This paper reports on the design, implementation and characterization of triaxial capacitive accelerometers operating in a low-pressure environment (∼1 Torr). Small form-factor devices, with proof-mass area of less than 1mm2, were fabricated on a 40 μm-thick SOI substrate using the HARPSS™ process to attain in-plane and out-of-plane nanoscale capacitive airgaps (∼300 nm). Increased sensitivity and...
We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical...
We propose a highly sensitive three-dimensional tactile sensor using the structure of elastic micro pyramids pressing on piezoresistive cantilevers. In the structure of the sensor we proposed, the forces acting on the surface of the elastomer were transmitted to the cantilevers through the pyramids. The key point of our sensor was that the cantilevers were not completely embedded inside the elastomer:...
Temperature and package stress induced errors pose a challenging obstacle for improving accuracy of strain-based resonant pressure sensors. This paper presents a multiple sensor solution where three resonators were built under a shared pressure sensor diaphragm. By manipulating the anchoring scheme and the location of the resonators, temperature and stress signals can be independently captured and...
A compact suspension-structure is on-chip integrated surrounding to a piezoresistive pressure sensing diaphragm for elimination of packaging-stress induced instability. The novel technology is named by us as PS3 (Packaging-Stress Suppressed Suspension). Using one single-side polished wafer and micromachining process only from the front-side, the cantilever-like PS3 structure is formed compactly around...
We present a handheld, biomolecular detector based on a cell phone platform. This prototype integrates a conventional smart phone with a custom electrical circuit and a microfluidic chip, which enables a portable, lightweight biodetection system. An electrochemical detection scheme is utilized, allowing for rapid (< 20 min), high sensitivity, analytical measurements. As proof of concept, Plasmodium...
This paper describes an investigation of drug effects for ion channels with recognizing the intra/extracellular directions. We have previously reported the ion channel recordings with bilayer lipid membranes (BLMs) which formed on a parylene micropore using droplets contact method. However, the low reconstitution probability of ion channels into BLMs has been a major issue. In this study, BLMs area...
This paper reports on a micro force plate array for measurement of ground reaction forces of insect legs during running. The micro force plate is composed of a plate base and three beams whose surface and sidewall area are doped, which enable to detect both pressure and shear force. The device size and force resolution are 2000 μm × 500 μm × 20 μm (length × width × height) and 1 μN, respectively....
This paper presents a micro propelling mechanism that may be possibly used to propel a micro medibot (medical robot) that can swim inside of animal/human bodies. A key contribution of this work is that, to our best knowledge, for the first time we microfabricate micro propelling devices based on bubble oscillation and prove the propelling mechanism in micro scale. The measured propelling speed is...
An active transporter of particle is essential for mixing, pumping, and separation in microfluidics. We propose an application of cilia of Vorticella as a particle transporter in a microchannel. We apply transport of particle to mix fluid in confined and continuous environments. Two solutions in stationary and dynamic fluids are mixed by Vorticella. In a microchamber, single Vorticella increases the...
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