2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) > 59 - 62
Source
Abstract
Identifiers
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4673-5654-1 |
book e-ISBN : | 978-1-4673-5655-8 |
DOI | 10.1109/MEMSYS.2013.6474176 |
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4673-5654-1 |
book e-ISBN : | 978-1-4673-5655-8 |
DOI | 10.1109/MEMSYS.2013.6474176 |