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We have developed an inexpensive inkjet printing process to fabricate percolation-based resistive strain gauges in a paper substrate. These strain sensors were fabricated by inkjet printing different suspensions containing conductive carbon black (CB). We have measured the resistance of these elements as a function of strain under low frequency cyclic loads to characterize the sensitivity of these...
In this work, lateral-extensional thin-film piezoelectric-on-substrate (TPoS) resonators, fabricated on both silicon and diamond, are driven beyond their bifurcation point in order to study the maximum allowable energy density before the resonator fractures. A method is presented to measure the stored energy of the resonator at different drive levels. The average measured critical energy density of...
We report a flexible electrocorticogram (ECoG) electrode array device with one directionally self-curling and -sticking properties, to solve the difficulty of the handling of thin (< 10 μm) substrate devices (Fig. 1). As the substrate, we use sandwiched parylene-N/-C which films have different linear expansion coefficients. The thermal dependences of the deflection and curvature radius of the paylene-N/-C...
FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50–150 nm in diameter with 15–20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic...
Certain porous silicon (PS) structures have demonstrated energetic characteristics when mixed with an appropriate oxidizer [1–4]. However, limited studies on the effect of PS structure on its combustion have been performed. This work investigates how various material properties of PS films; surface area, porosity and pore size, affect the combustion process. With pore sizes in the range of 2.6–5.2...
A novel lab-on-a-chip is presented for the high-throughput preparation of mammalian cell samples. The microfluidic chip consists of two temperature zones and five functional modules with a total number of four fluidic inlet and three outlet channels for sample collection. The key modules of the chip are a rapid split-and-recombine micromixer for biological system perturbation, a chaotic advection...
Wafer-bonding-based integration can be rapidly and easily tested between different types of devices by wafer-to-wafer flip-chip transfer technology described in this paper. Devices to be tested (e.g. MEMS) on a support wafer are bonded and electrically connected with a target wafer (e.g. LSI) using sticky silicone bumps, and then any of the devices are selectively debonded from the support wafer by...
This report describes preliminary results of reconstitution of an in vivo-like multi-layered placental barrier without porous membrane support. We used thin collagen membrane (10 μm in thickness, commercially available) as permeable support of placental barrier structure and cultured BeWo trophoblastic cells and HUVECs on either side of the membrane. Co-cultured cells deposited abundant basement membrane...
We have developed silicon mixed films, using a technique that combines a mist-jet ejection of crystalline silicon microparticles with PE-CVD of amorphous silicon. Using the mist-jet technology, a water mist containing silicon microparticles is ejected on the substrate. The size of coated microparticles is sub-micron. An amorphous silicon film of 500 nm was deposited after a native silicon dioxide...
Multi-step analytical tests such as enzyme-linked immunosorbent assay (ELISA) require delivery of multiple fluids into a reaction zone and counting of incubation time at different steps. This paper presents a new type of paper-based magnetic valves that can count the time and turn on or off a fluidic flow accordingly, enabling timed fluid control in paper-based microfluidics. The timing function of...
A novel ex-situ process control monitor (PCM) framework for sensor fabrication processes based on individual single-walled carbon nanotube (SWNT) transistors is presented. PCMs are designed, fabricated and evaluated to estimate the length and density of SWNTs in a typical sensor fabrication process through electrical measurements. We also show that the PCM structures are able to detect variations...
This paper reports on a micro force plate array for measurement of ground reaction forces of insect legs during running. The micro force plate is composed of a plate base and three beams whose surface and sidewall area are doped, which enable to detect both pressure and shear force. The device size and force resolution are 2000 μm × 500 μm × 20 μm (length × width × height) and 1 μN, respectively....
This paper presents a micro propelling mechanism that may be possibly used to propel a micro medibot (medical robot) that can swim inside of animal/human bodies. A key contribution of this work is that, to our best knowledge, for the first time we microfabricate micro propelling devices based on bubble oscillation and prove the propelling mechanism in micro scale. The measured propelling speed is...
This paper describes the self-assembly of “cell springs” using smooth muscle-like cells differentiated from multipotent dedifferentiated fat (DFAT) cells. Using a microfluidic co-axial device, DFAT cells suspended in extracellular matrix (ECM) mixture of fibrin and collagen were encapsulated within tubular alginate microfibers and formed into 3D fiber-shaped micro-constructs. Such DFAT cell fibers...
Microenvironmental biophysical stimuli influence diverse cellular functions, such as directional motility and stem cell differentiation. Previously, researchers have tuned the linear stiffness of microposts to investigate cell mechanobiological processes and direct cellular behavior; however, microposts suffer from an inherent, yet critical drawback — regulation of micropost stiffness is fundamentally...
This study presents a novel approach to fabricate highly-structured 3D vertically-aligned carbon nanotubes (VA-CNTs) architectures, and further integrates 3D VA-CNTs with MEMS surface micromachining to fabricate suspended 3D CNTs structures. The merits of presented approach are as follows: (1) highly-structured 3D VA-CNTs stacks can be achieved by predefining multilayered Al/Fe catalyst films; (2)...
This paper presents a novel in-liquid method to manipulate and micro-assemble MEMS in 3D by means of holographic optical trapping and hydrophobic interaction. Up to eight traps can be simultaneously generated with a trapping stiffness of 5 pN/μm each. SU8 cylinders (10μm diameter, 10μm-40μm height) were used as test MEMS, which could be translated with a speed of 6μm/s and rotated at 30 rpm. All forces...
This paper describes an investigation of drug effects for ion channels with recognizing the intra/extracellular directions. We have previously reported the ion channel recordings with bilayer lipid membranes (BLMs) which formed on a parylene micropore using droplets contact method. However, the low reconstitution probability of ion channels into BLMs has been a major issue. In this study, BLMs area...
This paper reports a droplet formation device having nanochannels fabricated with femtosecond-laser-assisted etching. With the combination of nanochannels embedded in a substrate and microchannels on the substrate surface, approximately 650 nm diameter water phase liquid droplets (approximately 150 aL in volume) have been produced. In addition, we confirmed that enzyme reaction inside a femtoliter...
A drag reduction by superhydrophobic (SHPo) surfaces is experimentally confirmed for the first time in a turbulent boundary-layer (TBL) flow, which represents the flows around moving vessels. The drag reduction is measured by comparing the displacement of a SHPo surface with that of a smooth hydrophobic surface in a given flow. Since the two surfaces each with an identical set of suspending beams...
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