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This paper presents the design and implementation of a novel dielectrophoresis (DEP) system with spiral channels and concentric electrodes for high resolution cell separation applications. The device is fabricated with a 4 mask parylene process and the design is optimized in MATLAB Simulinkreg to confine the operation. Tests with micro particles of different sizes are performed to show size-based...
This paper reports the completion of a parallel ultramicro-volume DNA ligation processes using a coplanar electrode type of electrowetting-on-dielectric (EWOD) microfluidic system. The droplets, containing DNA, a ligation enzyme and a multi-salt reaction buffer, served to complete the ligation using a developed EWOD system. In order to reduce the effect from environment, so the concept of core-shell...
We present an 8-fold biosensor system based on surface acoustic waves (SAW). The single biosensors are individually embedded in polymer housings and combined into a sensor array via a passive microfluidic polymer chip. The latter is set up as the main part of an indirect microfluidic flow injection analysis system which is able to strictly separate the system into reusable and disposable components...
An effective screening test for the early diagnosis of cancer is high on the agenda of oncologists, since early detection increases treatment options and patient prognosis. Using microfluidics and Hyperspectral Imaging Microscopy, we demonstrate the ability to capture and immunophenotype circulating tumor cells (CTCs), which are shed by carcinomas at an early stage and signify the presence of cancer...
A patch-clamp (PC) microchip with cell sorting and positioning functions is reported, showing promise for an automated PC microsystem, which can potentially help avoid drawbacks of random cell selection or positioning for a PC microchip. The cell sorting and positioning are enabled by air bubble (AB) actuators. AB actuators are pneumatic actuators, in which air pressure is generated by microheaters...
In this paper, a high sensitivity carbon nanotubes (CNTs) enhanced piezoelectric diaphragm-based immunosensor array for detecting anti-goat IgGs is reported. Anti-goat IgGs with 6 different concentrations was successfully detected at the same time. The average diameter of CNTs was characterized by AFM, changing from original 58 nm to 82 nm after absorbing goat IgGs. A nearly linear relationship between...
To investigate the mechanism underlying the low-temperature direct bonding of cyclo-olefin polymer (COP), ATR-FT-IR and XPS surface analysis methods and contact angle measurements were carried out for COP samples. Oxygen plasma, vacuum-ultraviolet (VUV), and VUV/O3 were selected for pretreatment. Surface analyses results showed that polar functional groups (e.g., -OH, -COOH) are generated by each...
Biosensors have a need to accurately detect and quantify a biological target within a complex medium, such as serum. Cells are uniquely qualified to accomplish this, but cannot communicate with the outside world. We demonstrate a synergistic fusion between a genetically engineered cell line and a wireless-compatible CMOS sensor leveraging the cells innate ability to specifically bind, amplify and...
A microfluidic array device has been developed for simultaneous production of multiple proteins in cell-free media. The device is fabricated from poly(methyl methacrylate) (PMMA). Since biological synthesis of a protein can be inhibited by a toxin, a lower yield of protein synthesis than the control indicates the presence of toxins. We have synthesized three proteins in the array device and found...
The contemporaneous measurement of different physical properties of a chemical sensing layer is expected to provide a general increase of selectivity. The application of this concept generally requires the use of multiple devices. In this paper, the measurement of optical and electric properties of one sensing layer with a single device is presented. The surface potential and optical sensitivities...
In this paper, we present imaging of the physiological cell reaction of stimulus-responsive cells using a new orifice channel chip named the TISSUE-MIMICKING IN VITRO ANALYSIS SYSTEM. The chip enables designated cells treatment using orifice-channels similar to blood vessels, and cell-array like a tissue: cells are along on the blood vessels. These cell handling is an important part in the observation...
We present an analysis on the blurring, electrical and optical properties of nanostructures fabricated by stencil lithography and their application for biomolecular sensing. We analyze the effect of the stencil-substrate gap on the blurring, then we present the fabrication and electrical characteristics of nanowires on plastic substrates, and finally, we demonstrate the application of nanodots for...
In this contribution we present the design, fabrication and measurement results of an evanescent liquid-core/ liquid-cladding (L2) waveguide sensor system for on-chip fluorescence spectroscopy. To efficiently excite the sample (fluorescent particles or solutions) in the laminar flow regime a novel hydrodynamic focusing design is realized which positions the analyte in the evanescent field region at...
In this paper, we present experimental results of frequency scaling and transducer optimization in internal dielectrically transduced silicon bar resonators. We show that selective positioning of the dielectric transducers inside the resonator can preferentially excite targeted harmonics while suppressing undesired modes. Furthermore, measurements across multiple resonators show lower motional impedance...
We have developed a 2-cm-diameter, shrouded wind turbine with an integrated axial flux permanent magnet generator. The device was fabricated using a combination of rapid prototyping, traditional machining and flexible printed circuit board technology, and employs jewel bearings for low friction. Wind tunnel tests have been performed on prototypes with 6 and 12 blades. The 12-blade design achieves...
In this paper, a MEMS energy harvester was investigated to scavenge power from ambient vibration source. It was designed to convert low level vibration to electrical power via the piezoelectric effect. The proposed energy harvester was fabricated by patterning Pt electrodes into inter-digital geometry on top of the sol-gel-spin coated Pb(Zr, Ti)O3 thin film for d33 mode on silicon cantilever with...
In this work, a novel device for batch separation of particles based on dielectrophoresis (DEP) is presented. The curved parts of serpentine micro-channel that causes performance deterioration in capillary electrophoresis (CE) due to the plug dispersion are effectively used in our design for dielectrophoretic separation. The top-and-bottom focusing electrodes are employed in the intermediate straight...
In this study, we have demonstrated atomic layer deposition (ALD) enabled interconnection technology for vertical, as-grown c-axis oriented GaN nanowire (NW) arrays encapsulated by benzocyclobutene (BCB). The nano-scaled ALD multilayer is essential to provide conformal dielectric/conductor coverage and precise thickness control for NW interconnects. Cross-sectional images taken in a focused ion beam...
Disease diagnosis at an early stage requires the availability of inexpensive platforms which can accurately and rapidly analyze a wide panel of biomarkers, genomic biomarkers in particular. Genetic biomarkers are typically detected through recognition of DNA hybridization events, which is typically performed using DNA microarrays, requiring overnight incubation times, and bulky and costly optical...
Integrated sensors based on microelectronic technology were first developed in the late 60s for medical applications. Today they have evolved into wireless integrated microsystems (WIMS), combining micropower circuits, wireless interfaces, hermetic packaging, embedded power sources, and MEMS. Such devices are poised to provide important breakthroughs in health care. This paper traces the development...
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