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To provide faster, more repeatable and stronger MEMS packaging technology, the dynamic characteristics of ultrasonic transducers are studied using finite element method (FEM), and the ultrasonic generator for driving the transducer is also presented in this paper. The finite element model of the high frequency ultrasonic transducer was established by using ANSYS software, and the vibration characteristics...
A new topology optimization method for designing thermomechanical compliant actuators using meshless methods is presented. The meshless method is employed to discretize the design domain and the bulk density field, which can avoid the undesirable mesh distortion when the standard finite element method (FEM) is applied. The method for imposing boundary conditions in the meshless method is discussed...
This paper reports a comparative study of full transient start up analysis of a Non-Resonant Micromachined Gyroscope using Finite Element Analysis (FEA) and System Model Extraction (SME) techniques. FEA is a popular numerical technique based on Finite Element Method (FEM) for carrying out different engineering analyses. But one of the major disadvantages of this FEA is its computational time. While...
It is always difficult to optimize parameters of capacitive micromachined ultrasonic transducers (CMUT) because of high computational time cost of finite element method (FEM) analysis and economic cost of prototype manufacturing. Thus a theoretical model is required in designing a CMUT. This paper presents such a 1-D lumped model. A transfer function between output sound pressure and input AC voltage...
Microelectromechanical systems (MEMS) sometimes use beam or plate shaped conductors that can be very thin-with h/LapO(10-2-10 -3) (in terms of the thickness h and length L of the side of a square pate). Such MEMS devices find applications in microsensors, microactuators, microjets, microspeakers and other systems where the conducting plates or beams oscillate at very high frequencies. Conventional...
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