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The effect of a nitrided oxide gate film produced by RTN on the boron penetration from a p+ poly gate electrode was studied. It was found that the RTN oxide gate is very effective for the suppression of boron penetration, even when the nitrogen concentration is as low as a few percent.
The integration aspects of a self-aligned CoSi2 technology in a submicron CMOS process are described. The effect of substrate type and doping on the final sheet resistance of CoSi2 was investigated. No significant influence on the sheet resistance of the finally formed CoSi2 measured, appart from an effect on the formation of the intermediate CoSi phase. The stability of CoSi2 at high temperature...
A comparison is made between silicon homojunction and Si/SiGe heterojunction technology by means of ECL gate delay calculations. The calculations are based on state of the art 1??m technology and basewidths of initially 0.1??m and then scaled basewidths of 0.025 ??m. Results of 42.5 ps for silicon homojunction circuits and 35.4 ps for HLBT circuts demonstrate improvement in gate delays for HBT silicon...
A simple method has been developed to enhance the thermal stability of TiSi2. It allows a RTA reflow step at temperatures higher than 1000??c without any increase in TiSi2 resistivity nor degradation of the contact structure. Its efficiency has been separately demonstrated on a polycide process and on diffusion areas.
1.2μm Bi-CMOS technology with ECL gate for high speed device has been developed. A process is carefully optimized for obtaining the best performance of ECL gate without degrading 1.2μm Bi-CMOS performance and mass productivity.
Sublinear signal propagation delay in VLSI circuits carries a far greater penalty in wire area than is commonly realized. Therefore, the global complexity of VLSI circuits is more layout dependent than previously thought. This effect will be truly pronounced in the emerging wafer scale integration technology. We establish lower bounds on the trade-off between sublinear signalling speed and layout...
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