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In order to solve the vibration during the process of transferring wafers and achieve the purpose of transferring wafers accurately and stably, the wafer transfer robot dynamic model was modelled and the strategy of vibration suppression based on input shaping was proposed. Based on the characteristics of wafer transfer robot, ZV input shaper and skewed shaper was designed to solve the single axis's...
Intelligent control of space manipulator with flexible-link and flexible-joint is discussed based on the singular perturbation method. Owing to the combined effects of the link and joint flexibilities, the dynamic model of this kind of manipulator becomes more complex and leads to a series of unsolved control system. To simplify the design of the control system, singular perturbation method is used...
An adaptive control scheme based on rigid control for a new model, in which a rigid manipulator handled a flexible payload which is simultaneously driven by an unknown force, is presented. The model of the whole system is derived. The uncertainty of the parameters of the manipulator is considered in the adaptive control scheme. The relationship between two internal forces is analyzed during the establishment...
The performances of various optical systems are inevitably influenced by mechanical vibration. In order to compensate the pointing errors of the light-beam caused by the mechanical vibration in long-distance light-beam transmission systems, a new scheme of light-beam stabilizing control is presented, which uses two position sensitive detectors to detect the pointing errors, and a single fast steering...
Folding-boom aerial platform vehicle is a type of construction vehicle used to hoist personnel to the appointed location in the aerial. As for aerial platform vehicle, the flexible deformations of the arm system cannot be neglected. Therefore, the flexible multi-body dynamics equations of the arm system of folding-boom aerial platform vehicle are established based on flexible multi-body dynamics theory...
Servo axes with standard P/PI-cascade feedback controller provide insufficient damping of structural vibrations at machine tools. The axis performance can be improved significantly by state space control extensions that are now available for commercial machine tool control systems. The benefit of state space control extensions depend directly on the suitable state capturing in the machine structure...
A three-channel bilateral control system which is hybrid of position control and force control in the acceleration dimension based on disturbance observer gets unstable in contact with environments under time delay. In this control system, the sum of master force and slave force is controlled to zero in common modal space to realize the law of action-reaction. This paper proposes a velocity damping...
This paper presents a vibration suppression approach for a galvanometric mirror in laser positioning devices. In the system, it is important to achieve a fast and high-precision positioning of the mirror by a motor. In addition, it is indispensable to maintain flatness of the mirror after position settling. However, since natural vibration frequencies of the mirror are excited by the force of moment...
In this paper, a nominal characteristic trajectory following (NCTF) controller for point-to-point (PTP) positioning system for two mass rotary system is introduced and its performance is evaluated. Generally, the NCTF controller consists of a nominal characteristic trajectory (NCT) and a compensator. The objective of the NCTF controller is to make the object motion follow the NCT and end at its origin...
The problems of rigid-flexible coupling dynamics modeling and control are proved to be hard to resolve owing to the large size and super-flexible structure of the solar sail spacecraft. This paper utilizes moment of momentum theorem to deduce rigid-flexible coupling dynamics equations including the attitude dynamics and vibration equations for super-flexible solar sail spacecraft with control vanes,...
This paper proposes two vibration suppression control systems for industrial robots. Industrial robots often occur vibration phenomenon which is caused by the resonant frequency and nonlinear interference force from various joints of the robot. The compact high-gear reduction without backlash, such as the harmonic gear is frequently used in the driving system for the sake of high load-to-weight performance...
This paper describes the use of angular position control approaches for a flexible robot manipulator with disturbance effect in the dynamic system. A nominal characteristic trajectory following (NCTF) controller is used to actively control the vibration of flexible structures. The controller design, which is comprised of a nominal characteristic trajectory (NCT) and PI compensator, is free from exact...
We have proposed a magnetic levitation control system for flexible steel plates and confirmed its feasibility through a digital control experiment. However, there is a risk that side slipping or the dropping of the plate may occur owing to inertial force, because the levitation control system does not provide any restraints for the direction of travel. Therefore, we have proposed the addition of electromagnetic...
This paper describes the use of angular position control approaches for a flexible robot manipulator with disturbance effect in the dynamic system. A nominal characteristic trajectory following (NCTF) controller is used to actively control the vibration of flexible structures. The controller design, which is comprised of a nominal characteristic trajectory (NCT) and PI compensator, is free from exact...
During the processing of wafer, in order to avoid the friction between wafer and wafer box, and to guarantee the clean state of the working environment simultaneously, small contour error and little vibration are required for wafer transfer robot to deliver wafer, i.e., to achieve stable and accurate trajectory for wafer delivery. To lessen contour error, suppress vibration, a kind of control algorithm...
A simple robust control method based on an observer with a multiple integrator plant model is investigated for a DC motor based drive with a flexible load. The problem of controlling the drive with unknown parameters and an external load torque is converted to the simple task of state control of the known plant model. The only information required for commissioning is the specified closed loop dynamics...
Haptic guidance has been investigated with force feedback for a long time. However, the equipment is expensive and affects the users' action. In this study, we use the vibration with motor to present user tactile feedback instead of force feedback. There are several different positions, inside the tunnel, outside of the tunnel and at the boundaries of tunnel, where designer can supply tactile feedback...
This paper present the characteristics of a cantilevered piezoelectric composite wing model, idealized as a composite flat plate. Based on the Hamilton principle, the dynamic equation of the piezoelectric composite plane is deduced. The aerodynamic force acting on the surface of the composite plane is computed in frequency domain using the doublet lattices method, fitted and transformed to time domain...
HDDs are necessary as an information storage equipment of the information technology devices. Since the application of HDDs expands by adjusting the digitization, the requirement for miniaturization and capacity enlargement of HDDs heighten. The areal density is defined as a multiplication of track density and linear density. With rapid increase in areal density, the head positioning servo controller...
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