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We demonstrate a direct transfer technique of Au thin layer onto electroplated Au surface from a surface of atomically smooth master wafer. An atomically smooth Au surface with a root mean square surface roughness of 0.6 nm could be transferred from the master wafer. We also examined its applicability to room-temperature Au-Au bonding in atmosphere. A high bonding strength of about 225 MPa was obtained.
Silicon nanowire (SiNW) arrays are demonstrated as a suitable substrate for the preconcentration of trace nitroaromatic compounds and subsequent desorption via Joule heating of the array. Arrays are fabricated from Si wafers containing epitaxially grown layers of high conductivity p-type Si, with a relatively low conductivity intrinsic Si layer. Arrays are fabricated using a combination of nanosphere...
Wafer-level thermocompression bonding (TCB) using aluminum (Al) is presented as a hermetic sealing method for MEMS. The process is a CMOS compatible alternative to TCB using metals like gold (Au) and copper (Cu), which are problematic with respect to cross contamination in labs. Au and Cu are commonly used for TCB and the oxidation of these metals is limited (Au) or easily controlled (Cu). However,...
Cu-Cu direct bonding under help of direct immersion gold (DIG) for multi-die fan-out wafer level package was demonstrated. Cu-Cu direct bonding is a critical technology for high-frequency applications. To solve challenges of conventional methods, the DIG was used. As a result, a cohesion failure was obtained in shear test.
To realize a nanogap-based single-molecule label-free detection device for surface-enhanced Raman scattering measurements, a new approach utilizing DNA origami (DO) as a sacrificial nano-structure is proposed. In this approach, gold nanoparticles (AuNPs) are precisely self-assembled to form a dimer structure on opposite faces of a rectangular DO structure. The AuNPs are then fixed on a silicon chip...
We demonstrated synthesis and immobilization of cupric oxide particles using X-ray radiolysis directly from a liquid solution. The X-ray radiolysis of CuSO4 and Cu(CH3COO)2 solutions was observed to produce higher-order microstructures consisting of cupric oxide (CuO, Cu2O, Cu4O3) particles and Cu particles. The sizes of the particles depended on the ratio of ethanol in the stock solution and the...
This paper presents evaluation of the effective Young's modulus of electroplated gold micro-cantilevers. Young's modulus is one of the fundamental parameters to design MEMS (microelectromechanical systems) components. Gold electroplated MEMS structures can be used to develop highly-sensitive MEMS sensors, such as accelerometers. With a resonant frequency method, we evaluate gold-electroplated Ti/Au...
In this paper, four designs for intersecting silicon Nano wall with planar nano-gold layers are proposed and simulated. Nano-gold layers are employed to create plasmonic modes at the Si/Gold interface. Adjusting the dimensions of the proposed hybrid Si-Gold structures shows 79.3% enhancement in the ultimate efficiency over the Si veins structure.
This paper reports an ultrasensitive surface-enhanced Raman spectroscopy (SERS) for detecting and identifying four kinds of DNA bases: adenine, cytosine, thymine, and guanine using a gold nanoparticle dimer. The gold nanoparticle dimer was directionally arrayed on a substrate in order to achieve huge enhancement according to the polarization-dependent enhancement. 10−11 M limit of detection for four...
Thin-film photovoltaic (PV) cell technology has been of keen interest over the last decade or so due to its lower cost of production, wide applicability and lower diffusion length for minority carriers. However, the conversion efficiencies of thin-film PV cells is much lower than that of conventional crystalline Si PV cells. Nanostructures have therefore been designed and implemented with such cells...
The new generation of spectrometers with high energy resolution can resolve elastic peaks of electrons reflected by atoms in solids. In this regard, there is an increasing interest in the applications of the so-called Elastic Peak Electron Spectroscopy (EPES) for measuring composition-versus-depth profiles since it is non-destructive and sensible to the presence of hydrogen in solids. This study presents...
Dual MSM PDs based on Transparent Conductive Oxides (TCO) and Au have been fabricated on Si and InP. The devices are designed to detect multiple wavelengths and can be integrated with VCSELs to form optical triplexers for communication systems.
Gold (Au) nanoelectrode ensembles (NEEs) were investigated after the synthesis of silicon nanowires using the metal assisted chemical etching technique. Structural and non-destructive optical characterization of silicon nanowires are carried out to determine its morphology and crystallinity. The cyclic voltammetry technique is used to determine the oxidation-reduction potentials of the sensor at different...
Functionalized engineered nanogap electrodes (pair of electrodes separated by a gap of a few nanometers) are utilized as tunneling chemoresistors for gas sensing and resistance switching at the molecular scale. The nanogap device consists of two gold electrodes vertically separated by a very thin spacer of 2 nm of α-Si and ∼4 nm of dielectric (SiO2 or Al2O3). A ∼10 nm wide sidewall air gap is formed...
An Otto chip device fabricated on silicon and sealed with a quartz window has recently been demonstrated as a potential alternative for the traditional Kretschmann based configuration for the development of surface plasmon resonance — SPR — sensors. We have fabricated open Otto chip structures as well and have characterized the surface plasmon resonance — SPR — effect at a wavelength of 975.1 nm....
Dynamic change in distribution of strain generated in Si under a pad electrode was measured during ultrasonic ball bonding by using newly developed Si strain sensor. The sensor was designed to be able to determine strains in the directions normal and parallel to the surface. Bonding of Cu and Au was measured. It was clearly observed that the position of the largest compressive strain moved from the...
The Josephson Arbitrary Waveform Synthesizer (JAWS) is currently being developed for generating precise voltage waveforms, for use in measurement standards. These system is based on superconducting Josephson junction arrays, and are operated by controlling the JAWS with high-speed (>10 GHz) current pulse trains in a cryogenic environment at 4K. Using an optical input rather than an electrical input,...
Monodisperse colloidal gold nanoparticles were self-assembled into ultra-large-area monolayers and used as coating films on intrinsic silicon to improve the optical modulation depth of terahertz (THz) waves. The monolayer does not attenuate the transmission of THz wave but largely boost the generation of electron-hole pairs in silicon. The THz modulation depth of silicon was improved by a factor of...
Pixelated LEDs are a new, high efficient light source which allows to control the beam pattern and which are therefore suitable for adaptive front light systems. We will present a concept for hybrid 3D flip chip stacking of pixelated LED chips onto an active matrix driver IC using a new interconnect structure to address thermal management and bonding robustness challenges. Two types of interconnect...
in this study we describe the design, the simulation and the characterization of a waveguided plasmonic lens on SOI. The lens is made of gold nanowires on a SOI waveguide. A thin silicon dioxide layer separates the gold nanowires from the SOI waveguide. This lens is made of a gradient index corresponding to the effective index of the gold wires on the silicon waveguide. Simulations and characterizations...
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