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This paper reviews the last two decades design, fabrication and characterization advances on high performance MEMS-based gas chromatography systems, the related architectures and their constitutive building blocks, which include preconcentrators, microvalves and related sample injection devices, micro-columns, and detectors. Micro-GCs hold potential for rapid analysis of volatile organic compounds...
Silicon-based MEMS microthruster matrix has gained great attention as a micro-impulsion system in recent years, especially in application of attitude control of the nanosatellites. Although silicon serves well as the structural material for microthruster matrix in several aspects, its ability to resist ablation is rather weak. In this paper, SiC membrane is introduced to the surface of micro-chambers...
We report on micro-machined flow-rate sensors as part of autonomous multi-parameter sensing devices for water network monitoring. Three different versions of the flow-rate sensors have been designed, fabricated and experimentally characterized. Those sensors are made of identical micrometric platinum resistors deposited on two different substrates-glass and silicon with and without insulation layer...
Based on the micro electronic mechanical system (MEMS) processing, a large size 2-D scanning mirror driven by electromagnetic force was designed and implemented in this paper. Here we fabricated micromirror with the silicon wafer and electroplated soft Ni film on the backside of mirror. The no-coil structural micro-mirror prevented heat produced on the mirror effectively. The scanning resonant frequency...
The proposed MEMS-technology viscosity sensor solves two major drawbacks associated with current state of the art MEMS viscosity sensors, such as: (1) Functional complexity and integration of external components for actuation and subsequent data acquisition; (2) Fabrication incompatibilities with CMOS processes. The proposed solution is based on thermally induced actuation, subsequent vibrations of...
Sub-micron wide Si rib patterns with a smooth sidewall and a high aspect ratio have been successfully formed using originally developed dry-etching apparatus with a high-density inductive coupled plasma source. The developed technique is applied for MEMS and X-ray devices.
A pure and high-frequency clock reference will benefit the radar transceivers, helping on generating superior chirp signals. Revealed by recent literatures, Lamb-wave resonator is a candidate to provide such a reference. However, reported equivalent-circuit models of Lamb wave resonators are not accurate enough to enable the designs of integrated circuits. This paper discusses necessities of high-frequency...
This paper reports the design and fabrication of dynamic ultra-miniature pressure sensor. Based on bulk silicon MEMS micromachining technology, the Si-Si direct vacuum bonding and thinning technology with precision control were used to fabricate the subminiature silicon piezoresistive chip for absolute pressure measurement. The sensors with outer diameter Φ2.0mm were packaged with miniature probe...
This paper reports on the enhanced piezoresistive effect in p-type <110> silicon nanowires, fabricated using a top down approach. The silicon nanowire width is varied from 100 to 500nm with thickness of 200 nm and length of 9μm. It is found that the piezoresistive effect increases when the nanowire width is reduced below 350 nm. Compared with micrometre sized piezoresistors, silicon nanowires...
Pressure sensor is a wide and matured application in the field of sensing and actuation. With respect to its advancements and its application at remote areas improvise the concept of self powered sensors. As supplying power to remote sensor is hectic one and battery replacement is not a convenient solution. To its advancements, without compromising the sensitivity as well as to explore the energy...
This paper presents a study of the electrostatically actuated circular micro-plates used in MEMS ultrasonic flow meter. In this paper, a distributed model has been used to investigate the pull-in instability and frequency response of circular plate subjected to nonlinear distributed electrostatic force. A variational formulation based on Hamilton's principle is used to obtain the nonlinear governing...
We report the first experimental demonstration of a heterodyne self-oscillator operating simultaneously on the first and second mode of a silicon NEMS resonator. This architecture tackles the simultaneous monitoring of a doubly-clamped resonator's first two resonant modes required for real world applications in the field of biological mass sensing. This oscillator is based on a downmixing scheme where...
We have fabricated MEMS infrared thermopiles from a silicon-on-insulator substrate where the buried oxide layer was used to form a membrane for thermal isolation of the detection area. The silicon wires of the thermocouples were patterned with a phononic crystal structure that consisted of 200nm holes on a 400nm pitch. The silicon was degenerately doped using a spin on dopant process to create the...
This paper reports a novel prototype of hydrogen sensing device with micro size, low power cost and low operating temperature. The sensor integrated sensing and heating function was fabricated with the process of bulk-Si MEMS. Two classic materials doped Pd, SnO2 and MnO2, were spun coating on inter-digital electrode device for detecting the hydrogen with various magnitude from 10ppm to10000ppm. Different...
MEMS technology has never been used for a non-imaging wearable ultrasound application, where e.g. lateral resolution is a minor issue. We combine finite element modeling and thin-plate analytic modeling and some measurements on MEMS devices, to optimize the performance of four MEMS layouts for a wearable bladder monitor. An array of square diaphragms, clamped on two sides, appears to be most favorable.
This paper outlines the approach to realize a MEMS pressure sensor suitable for meeting the stringent requirements of sensing in a downhole environment reaching 175-oC temperature and 200-MPa pressure while maintaining an accuracy of better than 0.02% for an extended measurement period of several weeks during oil and gas exploration. A few sensing structures are proposed and strategies for their optimization...
A novel cantilever array sensor was micro-fabricated for precise bio-marker detection. The device was fabricated on a SOI wafer with CMOS compatible processes. In order to reducing the effect of k variation due to adsorption, a local biochemical reaction cavity was designed in the free end of the cantilever, the antibody-immobilization was performed in this local area by micro printing technology...
The terahertz technique has been a hot research topic in recent years owing to its unique characteristics for potential applications such as high resolution spectrometers and high data rate space communications. Rapidly growing research activities from worldwide researchers have been involved in developing terahertz components. This paper reports some typical achievements of developing terahertz components...
Heterogeneous integration of micro-opto-electromechanical systems (MOEMS) and integrated circuits (ICs) allows the combination of high-quality optical and photonic MOEMS materials such as monocrystalline silicon (Si) with standard CMOS-based electronic circuits in order to realize complex optical systems. In this paper, we will present examples of such heterogeneous optical systems, including CMOS-integrated...
We demonstrated a MEMS based Monolithic Michelson interferometer with both the movable mirror and fixed mirror vertically oriented and integrated on a silicon bench for the first time. Both mirrors are single-crystal silicon based and their vertical orientation is attained by a proper thermal bimorph design and a unique stopper mechanism. This device enables miniature Fourier transform spectrometers.
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