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We propose a new approach for integration of electrodes as a part of the micro glass-blown spherical resonator fabrication process as well as an ALD metallization of the inner side of the spherical shell enabling electrostatic conduction. We use a 500µm thick silicon electrode whose electrostatic gap width, defined during the glass blowing process, is not limited by lithographic effect and enables...
This paper reports a 1.5 mm batch-fabricated polycrystalline diamond Cylindrical Resonator (CR) for gyroscope applications. The device is fabricated in a cylindrical shape using silicon on insulator (SOI) wafers and deep reactive ion etching (DRIE), which allows flexibility of choosing different geometries and materials for the resonator structure. A quality factor (Q) of 313,100 is measured at the...
We demonstrate how CMOS compatible photonic molecules (PM) can break the fundamental interdependence among quality factor (Q), channel spacing and size of microring resonators. Different PM architectures are presented for efficient and compact optical signal processing.
We demonstrate field-programmable 2×2 optical switch based on resonance elimination through dielectric breakdown phenomenon on a high-quality multilayer platform (Si/SiO2/Si). Fabricated device exhibits an on/off extinction ratio of more than 20 dB for both routes.
We describe nanophotonic design approaches for broadband light management including i) crossed-trapezoidal Si structures ii) Si photonic crystal superlattices, and iii) tapered and inhomogeneous diameter III-V/Si nanowire arrays.
In this talk, we review some progresses on tunable fractional photonic differentiator and first-order linear ordinary differential equation solver with an electronically tuned microring resonator.
To explore the potentials of hybrid plasmonics, ultrasharp 90 degree bends and resonators based on silicon waveguide and hybrid plasmonic waveguides are simulated and analyzed. Experimental demonstrations of ring and donut resonators based on hybrid plasmonics are also presented.
We demonstrate feedback control of silicon microrings by monitoring the light inside the resonators with a Contacless Integrated Photonic Probe (CLIPP), not requiring photon tapping from the waveguide. Tuning, real-time stabilization and swapping of the microring resonant wavelengths are shown.
The development of highly non-linear silicon devices is a fundamental step towards the realization of low power optical signal processing devices. In order to achieve this final goal several constraints have to be overcome. In particular, the next generation of opto-electronic integrated devices must be ultra-compact, compatible with foundry model fabrication processing and exhibit low power consumption...
We perform in-situ sensing of volatile droplet and spray masses using plate-like single crystal Si micro-resonators with low stress, where robust and reusable operation was attained over harsh conditions and over multiple cycles. A home-built electro-optical sensing system has been used. The effects on the resonant frequency of altered mass loading, elasticity and strain are compared, where the latter...
Polycrystalline Si (poly-Si) thin-film is widely used in optical MEMS/NEMS devices. However, the device performance depends on the crystallized structure in the poly-Si thin-film. We performed metal-induced lateral crystallization (MILC) to design the positions of grain boundaries in the poly-Si thin-film. Thin-film cantilever resonators were fabricated to discuss how grain boundaries affect the oscillation...
We report experimental and simulation results for silicon waveguides and resonant cavities in hyperuniform disordered photonic solids. Our results demonstrate the ability of disordered photonic bandgap materials to serve as a platform for silicon photonics.
A double-side-drive MEMS electrostatic optical chopper for time-resolved Raman spectroscopy to evaluate local dynamic stress in MEMS resonators has been proposed. The chopper is used as a mechanical pulse width modulator for the incident laser. The advantages are; 1) mechanical chopping, which can maintain the quality of source gas laser 2) small size for easy installation in commercial Raman spectrometer,...
We demonstrate feedback-control of a thermally actuated silicon microring resonator integrating a transparent light monitor. The microring resonance is locked to the wavelength of an external laser with 150 ms time response.
Nonlinear frequency generation with conversion efficiencies up to −40 dB at NIR-telecom wavelengths was achieved by degenerate four wave mixing applying Si/Chalcogenide glass hybrid racetrack resonators with Q-factors in the order of 105.
We demonstrate optical bistability (OB) in the cascaded silicon photonic crystal (SiPhC) nanoresonators using 10-GHz pulse light. The pulse energy to operate this device is less than 40 fJ with switching energy of 4.6 fJ.
We propose and experimentally demonstrate an on-chip comb filter implemented by tunable silicon Sagnac-loop reflectors. By using thermal-optic tuning, variable bandwidth from 4.0 GHz to 24.6 GHz is achieved.
We propose an N-bit optical digital-to-analog convertor based on silicon microring resonators. As a proof of concept, a 3-bit optical digital-to-analog convertor is demonstrated at a speed of 500 MSample/s
Dense photonic integration requires miniaturization of materials, devices and subsystems, including passive components (e.g., engineered composite metamaterials, filters, etc.) and active components (e.g., lasers, modulators, detectors). This paper discusses passive and active devices that recently have been demonstrated in our laboratory and design, fabrication and testing of nanolasers constructed...
Dense photonic integration requires miniaturization of materials, devices and subsystems, including passive components (e.g., engineered composite metamaterials, filters, etc.) and active components (e.g., lasers, modulators, detectors). This paper discusses passive and active devices that recently have been demonstrated in our laboratory and design, fabrication and testing of nanolasers constructed...
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