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This paper demonstrates a novel electronic nose (e-nose) system for volatile organic compounds (VOCs) detections which is composed of three high-Q piezotransduced single-crystal silicon bulk acoustic resonators (PSBARs) and functionalized with different self-assembled monolayers (SAMs). The different sensitivities of the PSBARs to VOCs are utilized to constitute unique identification codes for IPA,...
In this paper, a silicon cavity-mode resonator based on locally resonant phononic crystal (PnC) is experimentally studied. The PnC resonator is realized by creating line defects on a two-dimension (2-D) silicon PnC. The silicon resonator was fabricated by micro machining process, and tested by a combination of the fluid coupling method and Laser Doppler Vibrometer. Two resonant frequencies (7.93MHz...
We demonstrate a Fabry-Perot cavity for sensing highly absorbing liquids at terahertz frequencies. A sub-wavelength layer of liquid sample is accommodated between a ground plane and a silicon window. A probing terahertz pulse through the window can interrogate a minute change in the bulk properties of the sample. The sensing is manifested through a shift in the Fabry-Perot resonance. Importantly,...
Capacitive Micromachined Ultrasonic Transducers (CMUTs) fabricated using Silicon-On-Insulator (SOI) wafers often have large thickness variation of the flexible plate, which causes variation in both pull-in voltage and resonant frequency across the CMUT array. This work presents a bond and boron etch-stop scheme for fabricating the flexible plate of a CMUT. The proposed fabrication method enables precise...
Here, we design, fabricate, and characterize EIT-metamaterials by hybridizing two double split ring resonators (DSRRs) into a single unit cell. First we, develop a method to determine the effective thickness of metamaterials which is crucial in calculating the group velocity of THz radiation. Then, we present a novel approach to enhance and dynamically tune the slow light characteristic by twisting...
We demonstrated the diaphragm type PZT oscillator performance through simulation experiments. To achieve the desired frequency, firstly, the size of a diaphragm and a thickness of PZT and Si layers are optimized. Then, we select three different PZT/Si models. Finally, we analyze the models transmission efficiency, receiving sensitivity (piezoelectric voltage / electric charge) and frequency bandwidth...
In this paper, thin film diamond resonators on Si wafer for high sensitivity force sensing have been developed. Patterned diamond structures have been formed on Ir/YSZ/Si substrate. The completed diamond resonator of cantilever shows a resonance frequency of 51.0 kHz with a quality factor of 14911. The both clamped resonator shows the force sensitivity of 3.36×10−13 N/Hz0.5 at 229.3 kHz with 23500...
In this work, we have grown GaN nanowires using Plasma assisted Molecular beam epitaxy (PA-MBE) on Si (111) substrate. High resolution X-ray diffraction (HRXRD) characterization and scanning electron microscopy (SEM) studies were carried out to investigate the crystal structure, morphology and uniformity of the grown nanowires. These studies confirm wurtzite crystal structure and uniform growth. The...
In this work, we present the design and fabrication of high-frequency SiC nanoresonators for highly sensitive nanoparticle sensing. A 280-nm single crystalline SiC film was grown on a Si wafer, and released from the substrate using an isotropic dry etching process. The SiC nanoresonators were then formed using the Focused Ion Beam technique. The simulation results show that the as-fabricated resonators...
We describe a technique for realizing high-efficiency dielectric resonator antennas composed of intrinsic silicon in the terahertz range. These dielectric resonator antennas are deployed in both uniform and nonuniform array configurations, for the manipulation of terahertz radiation. The uniform array configuration is analyzed in terms of quality factor, and is subsequently employed as a highly efficient...
This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 µm were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS approach namely deposition of 3.78 µm thickness of Al doped Zinc Oxide (AZO) thin film, photolithography...
We present a high resolution and high frame rate (HRHF) Lissajous scanning. The Lissajous scanning was achieved by the selection rule of scanning frequencies, i.e., optimizing the greatest common divisor of transverse driving frequencies and the sum of transverse driving frequency ratios. HRHF Lissajous fiber scanner provides 10 fps with 89.5 % fill factor at driving frequencies of 1000 Hz and 1210...
The resonance properties of the metasurface were obtained using the pseudo-spectral time domain method. The frequency dependence of transmission and absorption of sub-THz waves passed through metasurface have been measured.
We numerically investigate the Kerr comb generation in wavelengths around 2 micrometers where two photon absorption is still present. It is shown that optical comb generation and mode locking is possible if free carriers are swept out with a reversed bias PIN junction.
A control strategy for LCL Grid-connected voltage source converters is proposed. With only grid feedback current control, the proposal allows the use of the proportional plus resonant regulator (PR) optimal design, regardless of the filter resonant frequency. To prove its feasibility, the controller is simulated in a realistic system for different values of resonant frequency. In addition, its superiority...
We study the propagation of short pulses 100 fs) in waveguides composed of silicon nanoparticles, in both linear and nonlinear regimes. We show that in the linear regime the pulses significantly broaden on a length of tens of micrometers, due to the strong waveguide dispersion of the chain. In the nonlinear regime, the pulse broadening can be compensated by nonlinear effects in the chains of nonspherical...
Optical frequency division based on mode-locked laser frequency combs makes possible the coherent transfer of frequency stability from optical systems to electronics. It has enabled a revolution in time keeping and frequency metrology. In this paper we describe progress on new methods for frequency comb generation including whispering-gallery-based microcombs and electro-optical comb generation. Demonstration...
On-chip integration of quartz resonators with Si devices opens new opportunities for microsystem miniaturization and enhanced performance. In addition to integrating with electronics, the integration of piezoelectric quartz resonators with other sensors of different material composition is also possible. In this paper, we demonstrate that a VHF SC-cut quartz resonator can be integrated within a high-aspect-ratio...
In this paper, the effect of crystalline orientation on acceleration sensitivity of silicon-based microelectromechanical resonators is investigated for the first time. In addition, the correlation between the nonlinearity of the resonators and the corresponding acceleration sensitivity is experimentally demonstrated. For this purpose, thin-film piezoelectric-on-substrate (TPOS) resonators are fabricated...
GNSS time transfer is widely used for remote clock comparisons, in particular by the BIPM for UTC/TAI. Comparing clocks with this technique requires a calibration of the GNSS reception chain (between the antenna phase center and the reference clock). CNES has been working extensively on the absolute calibration of GNSS reception chains for many years. This paper presents the recent improvements and...
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