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IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 3 > 293 - 305
IEEE Transactions on Industrial Electronics > 2017 > 64 > 8 > 6582 - 6590
IEEE Transactions on Plasma Science > 2017 > 45 > 7-1 > 1436 - 1442
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 3 > 293 - 305
IEEE Transactions on Industrial Electronics > 2017 > 64 > 8 > 6582 - 6590
IEEE Transactions on Plasma Science > 2017 > 45 > 7-1 > 1436 - 1442