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IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 1 > 80 - 91
IEEE Transactions on Automation Science and Engineering > 2015 > 12 > 1 > 106 - 115
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 1 > 80 - 91
IEEE Transactions on Automation Science and Engineering > 2015 > 12 > 1 > 106 - 115