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2011 International Reliability Physics Symposium > 5E.3.1 - 5E.3.6
Journal of Microelectromechanical Systems > 2011 > 20 > 3 > 753 - 763
IEEE Transactions on Plasma Science > 2011 > 39 > 11-3 > 3162 - 3167
2011 International Reliability Physics Symposium > 5E.3.1 - 5E.3.6
Journal of Microelectromechanical Systems > 2011 > 20 > 3 > 753 - 763
IEEE Transactions on Plasma Science > 2011 > 39 > 11-3 > 3162 - 3167