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Diamond Microfluidic Devices have been manufactured with the transfer moulding (so-called replica) method. Standard photolitography, SiO2/Al masking layers and high aspect ratio plasma etching (Bosch process) were used to form vertical walls of deep shapes in silicon. Then, a thick polycrystalline diamond layer was deposited (MPCVD) on the surface of the pre-shaped silicon mould, silicon was etched-off...
Summary form only given. Selective etching technology has been developed for selective removal of surface layer of polymer on micro and nano polymer matrix composites, leaving fillings virtually intact. This technology is useful for the coatings and composite industry for quality control of the product or in electronic industry for developing new nano-based sensor devices, and also elseware. The two...
This study presents diamond film growth, preparation, and characterization using microwave plasma-assisted chemical vapor deposition for gyrotron window materials intended for fusion plasma ignition in magnetic and inertial confinement fusion such as ITER. A surface polishing technique is utilized to polish the films to a mirror grade surface finish. A fine-grained film surface morphology is realized...
Summary form only given. Microwave plasma assisted CVD (MPACVD) of diamond has received renewed attention during the past several years. The recent experiments by Yan et al. (2002) have demonstrated the synthesis of high quality single crystal diamond with growth rates from 10 to over 100 mum/hr with operating pressures of 110-180 torr. High pressure operation allows higher reaction species concentrations...
For the plasma engineering of ITER, EC launchers will be used at the mid and top port levels. The EU is preparing the procurement of the upper port plug and JA the procurement of the equatorial. Part of these studies is to verify the window design and to work out, whether a concept is available for both launchers. To this goal, first experiments with low and high power mm-waves are performed and will...
Fluidized bed reactors are widely used in chemical engineering, but recently there is also increasing interest for processing particulate advanced materials in fluidized bed reactors. Examples include heat treatment, plasma-assisted surface treatment, etching, and coating. In this paper, a novel process for deposition of thin metallic and metal-nitride coatings on particulate substrates is reported...
A microwave re-entrant cavity is applied to create a miniature beam of plasma species. A miniature microwave plasma discharge is created using 2.45 GHz microwave energy to generate a discharge inside 1-2 mm inner diameter (i.d.) tubes with a micromachined aperture on the end. Through this aperture the plasma stream for materials processing is formed. The diameter of the plasma stream considered in...
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