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This study presents a novel design and fabrication process to realize a miniature polymer ball bearing slide table (slider) with long linear travel range. The linear slide table consists of a pair of V-shape silicon (111) crystal plane rails, and a suspended slider supported by four polymer ball bearings. The ball-housing on slider is also designed to confine the bearing. The slider, rails, and ball-housings...
This paper reports, for the first time, a new phenomenon named self-patterned electroplating used to selectively deposit a thin gold layer on vertical sidewalls of high-aspect-ratio channels. The ability to cover only vertical surfaces of three dimensional (3D) structures is a significant achievement in microsystems technology serving a wide range of applications including gas chromatography (GC)...
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