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The photoluminescence (PL) spectra at room temperature for the silicon-based samples doped by Nd and Ce by ion implantation are measured. The results show that all the samples possess blue-violet photoluminescence properties under the ultraviolet light excitation and its light emission is stable. The intensity of PL spectra is closely relative to the dose of implantation and to the temperature of...
In this work, we have successfully demonstrated SONOS memories with embedded Si-NCs in silicon nitride by in-situ deposition method. The self-assembly silicon nanocrystals were in-situ deposited within the Si3N4 storage layer by dissociation of dichlorosilane (SiH2Cl2) gas to a high density of 9 times 1011 cm-2. This new structure exhibits larger memory windows for up to 6 V, better program/erase...
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